期刊
JOURNAL OF PHYSICAL CHEMISTRY C
卷 117, 期 48, 页码 25643-25649出版社
AMER CHEMICAL SOC
DOI: 10.1021/jp410893e
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资金
- University of Maryland NSF-MRSEC
- MRSEC [DMR 05-20741]
- NSF [CHE 07-50334, 13-05892]
- U.S. Office of Naval Research MURI program
- Australian Research Council [FL120100038]
- Division Of Chemistry
- Direct For Mathematical & Physical Scien [1305892] Funding Source: National Science Foundation
- Australian Research Council [FL120100038] Funding Source: Australian Research Council
Exposure to oxygen at 300-340 degrees C results in triangular etch pits with uniform orientation on the surfaces of atomically thin molybdenum disulfide (MoS2), indicating anisotropic etching terminating on lattice planes. The triangular pits grow laterally with oxidation time. The density of pits scarcely depends on oxidation time, temperature, and MoS2 thickness but varies significantly from sample to sample, indicating that etching is initiated at native defect sites on the basal plane surface rather than activated by substrate effects such as charged impurities or surface roughness. Raman spectroscopy confirms that oxygen treatment produces no molybdenum oxide (MoO3) below 340 degrees C. However, upon oxidation above 200 degrees C, the Raman A(1g) mode upshifts and the linewidth decreases, indicating p-type doping of MoS2. Oxidation at 400 degrees C results in complete conversion to MoO3.
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