Strain-Driven Growth of Zinc Oxide Nanowires on Sapphire: Transition from Horizontal to Standing Growth

Recently, we showed large-scale fabrication of field-effect transistors from horizontal ZnO nanowires (NWs) on a-plane sapphire. Here, in examining the cross sections of such nanodevices, we use high-resolution transmission electron microscopy (HRTEM) and large-angle, convergent-beam electron diffraction (LACBED). We show how horizontally grown ZnO NWs influence their underlying sapphire surface and how substrate influences the growth directionality of the NWs. As a NW grows on sapphire, the substrate experiences a compressive strain of approximate to 7% in its [0001](sap) direction (along the width of a NW) to minimize its lattice mismatch with the ZnO NW. Accordingly, ZnO expands along its width to improve its lattice match with the sapphire. The growth direction of (1 (1) over bar 00) is suggested to be the direction that produces a lower lattice strain between ZnO and sapphire. Analyses of NW/sapphire interfaces show that single-crystal NWs grow epitaxially and semicoherently with many fewer misfit dislocations than theoretically expected. We attribute the formation of fewer dislocations at the interface to local relaxation of zinc oxide strain into the sapphire surface. This relaxation is in agreement with the observed deformation of the sapphire underneath the NWs. We also define a critical NW thickness beyond which the growth mode changes from horizontal to standing. Results indicate that below this thickness, gold nanodroplets partially wet both sapphire and ZnO crystals. Above the critical thickness, gold preferentially wets the ZnO nanocrystal, and formation of misfit dislocations at the interface becomes energetically favorable. Combination of these two effects is used to explain the observed change in the growth modes of the NWs.