Synthesis of vertically aligned Pd2Si nanowires in microwave plasma enhanced chemical vapor deposition system

Vertically aligned Pd2Si nanowires with Pd on tip have been grown using microwave plasma enhanced chemical vapor deposition system in hydrogen atmosphere with high degree of reproducibility. High resolution scanning electron microscopy and transmission electron microscopy show the growth of nanowire structures via root growth in vapor-liquid-solid (VLS) mechanism where hydrogen acts as catalyst for silicide formation with Pd-hydride being the dominant moving species in the microwave environment.