Palladium Catalyzed Vinyl Addition Poly(norbornenes): Silane Chain Transfer Agents, Hydroxyl Group Activators and Their Impact on Optical Density at 193 nm

Polymers of substituted norbornenes were produced using palladium catalysts in the presence of silane chain transfer agents (CTA) which act to control molecular weight. Yields were dramatically increased by addition of hydroxylic reagents such as ethanol. Spectroscopic analysis of these polymers by H-1 NMR and MALDI-TOF MS confirmed that hydrogen-terminated polynorbornenes are generated leading to extremely low optical densities at 193 nm. Negative tone compositions containing norbornene copolymers with aliphatic and fluorinated alcohol substituents have been demonstrated.