期刊
JOURNAL OF NUCLEAR MATERIALS
卷 376, 期 2, 页码 160-168出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/j.jnucmat.2008.02.070
关键词
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Thermally induced decomposition of hard and soft amorphous hydrocarbon films was investigated by thermal effusion spectroscopy. Released species were detected by a sensitive quadrupole mass spectrometer using two different experimental setups for thermal effusion. Species released in a molecular beam setup were detected in direct line of sight to the sample surface, while species released in a remote UHV oven had no direct line of sight to the mass spectrometer. Soft, hydrogen-rich carbon films exhibit a desorption maximum at T approximate to 740 K while hard films with a low hydrogen content have their maximum at T approximate to 870 K. Additionally, the spectrum of released species differs dramatically between hard and soft films. We found a significant redeposition of species released from soft films. From the redeposited fraction of material we estimated an average redeposition probability of about 50% for species released from soft films. (C) 2008 Elsevier B.V. All rights reserved.
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