Pulsed laser deposition of Al-doped ZnO films on glass and polycarbonate

Al-doped ZnO (AZO) films were deposited on glass and polycarbonate (PC) at room temperature by using pulsed Nd:YAG laser at 355 nm. AZO thin films were obtained for both substrates at laser fluences from 2 to 5 J/cm(2) in O-2 partial pressure of 2.1 Pa. The effects of laser fluence on the structural, electrical, and optical properties of the films were investigated. The films with lowest resistivity and highest transmittance have been obtained at 2 J/cm(2). The resistivities were 2.29 x 10(-3) Omega cm for AZO on glass and 1.49 x 10(-3) Omega cm for AZO on PC. With increasing laser fluence, the deposited films have lower crystallinity, higher resistivity, and smaller optical bandgap. (C) The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License.