Measurement uncertainties of size, shape, and surface measurements using transmission electron microscopy of near-monodisperse, near-spherical nanoparticles

Transmission electron microscopy (TEM) in combination with a systematic selection procedure for unbiased random image collection, semi-automatic image analysis, and data processing has been validated for size, shape, and surface topology measurements of silica nanoparticles. The validation study, assessing the precision and accuracy of the TEM method, consists of series of measurements on two colloidal silica-certified reference materials, with number-based modal area-equivalent circular diameters (ECD) of 19.4 nm (ERM-FD100) and 27.8 nm (ERM-FD304). The measurement uncertainties are estimated for the modal and median particle size, shape, and surface topology parameters of single primary particles. The single primary particles are distinguished from agglomerates using a linear discriminant analysis approach. After optimization of the binning process, the mode associated with the number-based particle size distribution is obtained by lognormal fitting. The methodology described in this paper relies on a high level of automation of calibration, image acquisition, image analysis, and data analysis and gives robust results for the modal ECD. The expanded uncertainty of the modal ECD is estimated to be about 3 %. The largest contribution to the expanded uncertainty stems from the uncertainty associated with the trueness of the TEM method.