期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 24, 期 12, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/24/12/125012
关键词
42.79.Bh lenses; prisms and mirrors 42.82.Cr fabrication techniques; lithography; pattern transfer 42.25.Fx diffraction and scattering
类别
资金
- National Natural Science Foundation of China [91323303, 51305337, 51275400]
- National Science and Technology Project [2011ZX04014071, SK201401A53-01, CERS-1-X1]
- Fundamental Research Funds for the Central Universities
- Natural Science Foundation of Shaanxi Province [2013JQ7021]
- Specialized Research Fund for the Doctoral Program of Higher Education [20130201120036]
- China Postdoctoral Science Foundation [2012M520081, 2013M530419, 2013M530424, 2013M532035]
This paper presents a simple but effective process to fabricate high quality aspheric microlens arrays (MLA) and bifocal microlens arrays (BMLA) by predicting and adjusting the UV light distribution. The profile-controllable BMLA has two different focal lengths simultaneous along the optical axis, measured at f(1) = 26 +/- 1 mu m (the top lens) and f(2) = 35 +/- 1 mu m (the base lens), respectively. The fill-factor and curvature of the obtained profiles have been well optimized by controlling the air gap and exposure time, for instance, the fill factor is topped up to 99.7% from an initial 25.8% (the corresponding aperture diameter is enlarged to 15 mu m from an initial 10 mu m) and the micro lens height ranges from 2.66 mu m to 9.03 mu m. Optical tests indicate that MLAs and BMLAs have a uniform shape and a good consistency of the focal length. By adjusting the light distribution, this proposed strategy possesses the ability and flexibility to fabricate profile-controllable MLAs and BMLAs.
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