相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。Fabrication of a Micromachined Two-Dimensional Wind Sensor by Au-Au Wafer Bonding Technology
Ziqiang Dong et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2012)
Micromachined Thermal Flow Sensors-A Review
Jonathan T. W. Kuo et al.
MICROMACHINES (2012)
An Offset Compensation Method With Low Residual Drift for Integrated Thermal Flow Sensors
Paolo Bruschi et al.
IEEE SENSORS JOURNAL (2011)
A Cross-Type Thermal Wind Sensor With Self-Testing Function
Guang-Ping Shen et al.
IEEE SENSORS JOURNAL (2010)
A FCOB packaged thermal wind sensor with compensation
Guang-Ping Shen et al.
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2010)
Fabrication of nano-sized metal patterns on flexible polyethylene-terephthalate substrate using bi-layer nanoimprint lithography
Seon Yong Hwang et al.
THIN SOLID FILMS (2009)
Flip-chip packaging for a two-dimensional thermal flow sensor using a copper pillar bump technology
Jian-Bo Sun et al.
IEEE SENSORS JOURNAL (2007)
Thermal stress analyses of multilayered films on substrates and cantilever beams for micro sensors and actuators
C. H. Hsueh et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2006)
Multi-range silicon micromachined flow sensor
N Sabaté et al.
SENSORS AND ACTUATORS A-PHYSICAL (2004)
A smart wind sensor using thermal sigma-delta modulation techniques
KAA Makinwa et al.
SENSORS AND ACTUATORS A-PHYSICAL (2002)
Thermal flow sensor for ultra-low velocities based on printed circuit board technology
NT Nguyen et al.
MEASUREMENT SCIENCE AND TECHNOLOGY (2001)
Behavior of bulk micromachined silicon flow sensor in the negative differential resistance regime
SK Gamage et al.
JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2000)
The development and application of microthermal sensors with a mesh-membrane supporting structure
ST Hung et al.
SENSORS AND ACTUATORS A-PHYSICAL (2000)