期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 23, 期 9, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/23/9/095007
关键词
-
类别
资金
- National Science Foundation [CNS 0941497]
- Division Of Computer and Network Systems
- Direct For Computer & Info Scie & Enginr [0941497] Funding Source: National Science Foundation
A large-stroke (8 mu m) parametric resonator excited by an in-plane 'shaped-finger' electrostatic comb drive is fabricated using a 15 mu m thick silicon-on-insulator microelectromechanical systems (SOI-MEMS) process. A quadratic capacitance-engagement response is synthesized by engineering a custom-shaped comb finger profile. A folded-flexure suspension allows lateral motion while constraining rotational modes. The excitation of the nonlinear parametric resonance is realized by selecting an appropriate combination of the linear and cubic electrostatic stiffness coefficients through a specific varying-gap comb-finger design. The large-amplitude parametric resonance promotes high signal-to-noise ratio for potential use in sensitive chemical gravimetric sensors, strain gauges, and mode-matched gyroscope applications.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据