期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 23, 期 10, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/23/10/105014
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资金
- Karlsruhe Nano Micro Facility (KNMF)
- Helmholtz Research Infrastructure at Karlsruhe Institute of Technology (KIT)
Hot embossing and pulling techniques are presented allowing the fabrication of hierarchical micro- and nano-structures. By utilizing demolding forces we replicate nanopillars with high aspect ratio (AR of 10) and small diameters (200 nm). Furthermore, we draw a dense nanofur either with defined or random design. Introducing a electromechanical sensor system we subsequently fabricated a threefold hierarchical structure. Using these replication techniques tiny hairs for bio-inspired designs can be realized with short cycle times and high scalability.
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