期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 22, 期 9, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/22/9/097001
关键词
-
We describe a new class of electrostatic actuators with a compliant electrode made of liquid metal alloy contained by a thin elastomeric membrane. We illustrate the use of such actuators as on-chip microvalves for gas flow control. The microvalve comprises of one fixed electrode spanning the floor and sidewalls of the trapezoidal gas channel and one corresponding flexible electrode suspended across the channel. Details of fabrication and preliminary characterization of on/off and proportional valving are presented.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据