期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 21, 期 9, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/21/9/095018
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- King Abdullah University of Science and Technology (KAUST)
- University of California
In this study we demonstrate a novel approach for the rapid fabricating micro scale metal (silver) patterning directly on a polydimethylsiloxane (PDMS) substrate. Silver nanoparticles were sintered on PDMS to form conductive metal films using laser direct write (LDW) technology. To achieve good metal film quality, a capillarity-assisted laser direct writing (CALDW) of nanoparticle suspensions on a low surface energy material (PDMS) was utilized. Experimental results showed controllable electrical conductivities and good film properties of the sintered silver patterns. This study reveals an advanced method of metal patterning on PDMS, and proposes a new research application of LDW in a nanoparticle colloidal environment.
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