期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 21, 期 8, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/21/8/085025
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资金
- Spanish national program Plan Nacional [TEC 2010-14832]
- ICREA Funding Source: Custom
LiNbO3 is a crystal widely used in photonics and acoustics, for example in electro-optic modulation, nonlinear optical frequency conversion, electric field sensing and surface acoustic wave filtering. It often needs to be combined with other materials and used in thin layers to achieve the adequate device performance. In this paper, we investigate direct bonding of LiNbO3 crystals with other dielectric materials, such as Si and fused silica (SiO2), and we show that specific surface chemical cleaning, together with Ar or O-2 plasma activation, can be used to increase the surface free energy and achieve effective bonding at room temperature. The resulting hybrid material bonding is very strong, making the dicing and grinding of LiNbO3 layers as thin as 15 mu m possible. To demonstrate the application potentials of the proposed bonding technique, we have fabricated and characterized a high-voltage field sensor with high sensitivity in a domain inverted and bonded LiNbO3 waveguide substrate.
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