Batch production of single-crystal diamond bridges and cantilevers for microelectromechanical systems

The utilization of single-crystal diamond offers a way to achieve extreme semiconductor and mechanical properties of diamond for microelectromechanical systems (MEMS). However, current diamond MEMS devices are limited to polycrystalline or nanocrystalline films. In this paper, we report on the batch fabrication and mechanical operation of single-crystal diamond bridges/cantilevers. The bending of these bridges/cantilevers is achieved by nanoindentation with atomic force microscopy. The resonant vibration of the cantilevers is demonstrated by using a piezoelectric actuation method with direct optical readout. These bridges/cantilevers exhibit high-quality single crystal. The maximum measured Young's modulus of the diamond bridges/cantilevers is more than 1000 GPa. The air gap between the diamond bridges/cantilevers and the substrate guarantees the application of single-crystal diamond to the MEMS.