期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 20, 期 11, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/20/11/115036
关键词
-
类别
资金
- DARPA [HR0011-0600049]
- National Science Foundation [ECS-9731293]
This paper reports the parallel internal electrostatic transduction of a laterally driven Lame-mode polysilicon resonator. The transducer is fabricated using a manufacturable double nanogap process, where the 50 nm silicon nitride dielectric layers are formed on sidewalls of an optically defined trench by a conformal deposition, which is followed by refilling the trench with a doped polysilicon electrode layer. The transduction electrodes are placed and oriented to maximize electromechanical transduction efficiency for the fundamental Lame mode. A 128.15 MHz Lame-mode resonator is driven and sensed differentially, resulting in a motional resistance of 30 k Omega and the quality factor of Q > 12 000 in air.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据