相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。An electrothermomechanical lumped element model of an electrothermal bimorph actuator
Shane T. Todd et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2008)
A nodal analysis method for simulating the behavior of electrothermal microactuators
Ren-Gang Li et al.
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS (2008)
Electrothermally actuated RF MEMS switches suspended on a low-resistivity substrate
David Girbau et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2007)
Dynamic response modeling of MEMS micromirror corner cube reflectors with angular vertical combdrives
Young Ki Hong et al.
JOURNAL OF LIGHTWAVE TECHNOLOGY (2007)
Design of a novel MEMS platform for the biaxial stimulation of living cells
N. Scuor et al.
BIOMEDICAL MICRODEVICES (2006)
Method for determining a dynamical state-space model for control of thermal MEMS devices
B Borovic et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2005)
Low-voltage, large-scan angle MEMS analog micromirror arrays with hidden vertical comb-drive actuators
D Hah et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2004)
Electrothermal properties and modeling of polysilicon microthermal actuators
AA Geisberger et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)
A reliable single-layer out-of-plane micromachined thermal actuator
WC Chen et al.
SENSORS AND ACTUATORS A-PHYSICAL (2003)
Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators
R Hickey et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS (2002)
Bent-beam electrothermal actuators - Part II: Linear and rotary microengines
JS Park et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2001)
In-plane tip deflection and force achieved with asymmetrical polysilicon electrothermal microactuators
ES Kolesar et al.
THIN SOLID FILMS (2000)
分享论文
