相关参考文献
注意:仅列出部分参考文献,下载原文获取全部文献信息。Needle-free delivery of macromolecules across the skin by nanoliter-volume pulsed microjets
Anubhav Arora et al.
PROCEEDINGS OF THE NATIONAL ACADEMY OF SCIENCES OF THE UNITED STATES OF AMERICA (2007)
Micromachined high-aspect-ratio parylene spring and its application to low-frequency accelerometers
Yuji Suzuki et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2006)
Polyurethane rubber all-polymer artificial hair cell sensor
Jonathan M. Engel et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2006)
Antistick postpassivation of high-aspect ratio silicon molds fabricated by deep-reactive ion etching
JX Gao et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2006)
A single-layer PDMS-on-silicon hybrid microactuator with multi-axis out-of-plane motion capabilities - Part I: Design and analysis
YC Tung et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2005)
Inscribed matter as an energy efficient means of communication with an extraterrestrial civilization
C Rose et al.
NATURE (2004)
Single mask, large force, and large displacement electrostatic linear inchworm motors
R Yeh et al.
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2002)