Three-axis micro-force sensor with sub-micro-Newton measurement uncertainty and tunable force range

The first three-axis micro-force sensor with adjustable force range from +/- 20 mu N to +/- 200 mu N and sub-micro-Newton measurement uncertainty is presented. The sensor design, the readout electronics, the sensor characterization and an uncertainty analysis for the force predictions are described. A novel microfabrication process based on a double silicon-on-insulator (SOI) substrate has been developed enabling a major reduction in the fabrication complexity of multi-axis sensors and actuators.