期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 19, 期 6, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/19/6/065015
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资金
- Natural Sciences and Engineering Research Council of Canada
- Canadian Institutes of Health Research [323533-06]
- Frank and Barbara Milligan Fellowship
- Ontario Graduate Scholarship
- Canada Research Chairs
Shrinkage of polydimethylsiloxane (PDMS) complicates alignment registration between layers during multilayer soft lithography fabrication. This often hinders the development of large-scale microfabricated arrayed devices. Here we report a rapid method to construct large-area, multilayered devices with stringent alignment requirements. This technique, which exploits a previously unrecognized aspect of sandwich mold fabrication, improves device yield, enables highly accurate alignment over large areas of multilayered devices and does not require strict regulation of fabrication conditions or extensive calibration processes. To demonstrate this technique, a microfabricated Braille display was developed and characterized. High device yield and accurate alignment within 15 mu m were achieved over three layers for an array of 108 Braille units spread over a 6.5 cm(2) area, demonstrating the fabrication of well-aligned devices with greater ease and efficiency than previously possible.
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