Dynamic response of low aspect ratio piezoelectric microcantilevers actuated in different liquid environments

The response of commercial piezoelectric AFM probes for potential applications in the field of chemical or biological sensors operating in liquids is investigated using laser Doppler vibrometry. The present work investigates the roles played in the frequency response by the density and the viscosity of different water-glycerol mixtures, in a frequency range of up to 1 MHz in air. Since the width of the tested probes is relatively large (and hence the aspect ratio remains small), inertial loading effects dominate viscous effects, unlike in cantilevers characterized by larger aspect ratios. Measurements are compared with results provided by a simplified computer model of a probe immersed in an inviscid surrounding fluid.