期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 18, 期 7, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/18/7/075019
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In this paper, we demonstrate the integration of high-performance single crystalline inorganic mu-light emitting diodes (LEDs) onto unconventional substrates such as plastic and glass via self-assembly. AlGaAs-based free-standing red mu-LEDs were batch fabricated and released from their substrates for use in self-assembly. The templates for assembly were fabricated on substrates such as flexible plastics and glass. The self-assembly method is capable of positioning the micro-components onto the template in proper receptor sites with a high yield, and forming electrical connections between components and the template with 62% yield. The mu-LEDs remain functional even after significant bending and deformation of the plastic substrates. The self-assembly method offers a way to incorporate optoelectronics onto objects that are incompatible with conventional semiconductor manufacturing processes.
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