期刊
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
卷 18, 期 2, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/18/2/025031
关键词
-
We present the microfabrication and characterization of a reciprocating-type poly(methylmetacrylate) (PMMA) ball-valve micropump which is actuated with a high-performance and compact electromagnetic circuit of centimeter size. We have improved by finite element calculations the magnetic design of the electromagnet that actuates a NdFeB permanent magnet embedded in a poly(dimethylsiloxane) (PDMS) pumping membrane. Powder blasting technology and conventional micromachining techniques are employed for the microstructuring of PMMA layers. The ball-valve micropump is bubble tolerant and has self-priming capabilities. It has a resonant frequency of around 20 Hz, and it exhibits a backpressure up to 37 kPa; water is pumped at flow rates up to 6.8 mL min(-1) for a 2 W electromagnetic actuation power. The actuation frequency dependence of the flow rate can be well described by a fluidic damped oscillator model.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据