期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 22, 期 2, 页码 349-355出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2012.2222867
关键词
Aluminum oxide; nichrome (NiCr); superstrate bonding; tactile sensors
类别
资金
- Texas Ignition Fund grant program
Piezoresistive NiCr tactile sensors have been developed on surface micromachined aluminum oxide membranes, embedded between two polyimide layers, i.e., one serving as a substrate, another as a superstrate. A novel method to bond a flexible superstrate polyimide layer onto a microelectromechanical system tactile sensor array is presented. The piezoresistors were connected in a half-Wheatstone bridge configuration to minimize the effects of thermal drift. Three different types of sensor designs were fabricated and characterized to obtain the nichrome thin-film gauge factor. The experimental results were compared with those simulated for the same conditions of membrane deflection. The gauge factors range between 2.2 and 7.9 for sensors with a superstrate and between 1.5 and 3.2 without a superstrate.
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