期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 21, 期 2, 页码 316-323出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2011.2178115
关键词
Cylindrical photolithography; microlens array (MLA); optical film; roller imprinting; seamless roller mold
类别
资金
- National Science Council (NSC) of Taiwan [NSC 99-2120-M-006-001]
This paper describes an innovative approach for fabricating a seamless roller mold based on cylindrical photolithography, isotropic chemical etching, and electropolishing. Hexagonally arrayed concave microstructures with a near-semispherical profile are directly and seamlessly fabricated on a metal roller. The fabricated roller mold is then used for continuous roller imprinting of microlens array (MLA) on a thin polyethylene terephthalate (PET) substrate. The fabricated ball-shape microlenses have a footprint diameter of 54 mu m and a sag height of 20.5 mu m and are hexagonally close packed with a filling ratio larger than 91%. This MLA/PET optical film can serve as a brightness enhancement film in flat panel backlighting, and its optical performance is experimentally verified. A 30% increase in the forward on-axis luminance is observed.
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