期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 20, 期 5, 页码 1131-1142出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2011.2162488
关键词
Low-frequency vibrations; microelectromechanical systems (MEMS); piezoelectric energy harvester; piezoelectric thin film (PZT); wideband
类别
资金
- University Research Fund [R-263-000-475-112]
- Academic Research Committee at the National University of Singapore [MOE2009-T2-2-011, R-263000598112]
A piezoelectric MEMS energy harvester (EH) with low resonant frequency and wide operation bandwidth was designed, microfabricated, and characterized. The MEMS piezoelectric energy harvesting cantilever consists of a silicon beam integrated with piezoelectric thin film (PZT) elements parallel-arranged on top and a silicon proof mass resulting in a low resonant frequency of 36 Hz. The whole chip was assembled onto a metal carrier with a limited spacer such that the operation frequency bandwidth can be widened to 17 Hz at the input acceleration of 1.0 g during frequency up-sweep. Load voltage and power generation for different numbers of PZT elements in series and in parallel connections were compared and discussed based on experimental and simulation results. Moreover, the EH device has a wideband and steadily increased power generation from 19.4 nW to 51.3 nW within the operation frequency bandwidth ranging from 30 Hz to 47 Hz at 1.0 g. Based on theoretical estimation, a potential output power of 0.53 mu W could be harvested from low and irregular frequency vibrations by adjusting the PZT pattern and spacer thickness to achieve an optimal design. [2010-0346]
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