期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 20, 期 6, 页码 1428-1438出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2011.2167669
关键词
Carbon nanotube (CNT) forest; functionalization; microfluidics; multiscale bioparticle isolation; nanoporosity; permeability
类别
资金
- U.S. Department of State
- Massachusetts Institute of Technology
- National Institute of Biomedical Imaging and Bioengineering [P41 EB002503]
We demonstrate integration of ultraporous (99% porous) elements composed of nanoporous forests of vertically aligned carbon nanotubes (VA-CNTs, or VACNTs) in microelectromechanical systems (MEMS), illustrating their use in fluidic applications for biomedical diagnostics. Our method enables definition of high-aspect-ratio (similar to 10(4), heights similar to 100 mu m, and pore spacings similar to 10 nm) nanoporous elements and preserves the VACNT elements' shapes even under flowthrough conditions. The fluid permeability of the VACNT elements is measured experimentally and shown to be comparable to that of much larger micro-and macroscopic porous materials. Permeability tailoring of VACNT elements through manipulation of both material and CNT growth process parameters is also experimentally demonstrated. Distinct from solid designs (e. g., Si and polydimethylsiloxane), our approach enables fluid flow both around and through the nanoporous microfluidic elements, hence enhancing isolation efficiency by increased physical interaction between the particles in the flow and the functional elements. Simultaneous multiphysics (chemical and mechanical) and multiscale (several orders of magnitude in size) isolation of bioparticles using microfluidic devices with nanoporous elements is demonstrated as well.
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