期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 19, 期 1, 页码 183-191出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2009.2036584
关键词
Chemical sensing; CMOS microelectromechanical systems (MEMS); humidity; permittivity
类别
资金
- U.S. Air Force Office of Scientific Research [FA9550-07-1-0245]
- National Institute of Occupational Safety and Health [200-2002-00528]
- U. S. Department of Homeland Security
A high-sensitivity capacitive humidity sensor intended for use as part of a respirator end-of-service-life indicator system is presented. This paper reports a method for improving the sensitivity of integrated capacitive chemical sensors by removing the underlying substrate. The sensor is integrated with CMOS testing electronics using maskless postprocessing followed by ink-jet deposition of a sensitive polymer. Two different methods of depositing polymer, namely, capillary wicking and coating the top surface directly, were investigated. The sensors had measured sensitivities of 0.16% to 0.18% change in capacitance per percent relative humidity, which is the highest demonstrated for an integrated capacitive humidity sensor. Temperature sensitivity of the sensor, which is an important criterion for a sensor intended for a variety of different ambient conditions, was measured to be 0.07%/degrees C. The cross sensitivities to toluene and acetone, which are two common industrial solvents that are filtered by respirator cartridges, were measured to be 2.4 x 10(-4) and 9.0 x 10(-5)%/ppm, respectively. [2009-0165]
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据