期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 19, 期 3, 页码 570-580出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2010.2045879
关键词
AlN contour-mode resonator; microelectromechanical systems (MEMS); multifrequency oscillator; nonlinearity; phase noise; Pierce oscillator; piezoelectric resonator
This paper reports on the first demonstration of multifrequency (176-, 222-, 307-, and 482-MHz) oscillators based on the piezoelectric AlN contour-mode microelectromechanical systems technology. All the oscillators show phase noise values between -88 and -68 dBc/Hz at 1-kHz offset frequency from the carriers and phase noise floor values as low as -160 dBc/Hz at 1MHz offset. The same Pierce circuit design is employed to sustain oscillations at the four different frequencies; on the other hand, the oscillator core consumes 10 mW. The AlN resonators are currently wire bonded to the integrated circuit realized in the AMIS 0.5-mu m 5-V complimentary metal-oxide-semiconductor process. Limits on phase noise and power consumption are discussed and compared with other competing technologies. This paper constitutes a substantial step forward toward the demonstration of a single-chip multifrequency reconfigurable timing solution that can be used in wireless communications and sensing applications.
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