期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 19, 期 6, 页码 1370-1379出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2010.2076785
关键词
Microelectromechanical systems (MEMS); mirror; optical microelectromechanical systems; piezoelectric actuator; PZT; variable optical attenuator
类别
资金
- National University of Singapore [R-263-000-475-112]
- GLOBALFOUNDRIES, Singapore
A gold-coated silicon mirror (5 mm x 5 mm) actuated by piezoelectric Pb(Zr, Ti)O-3 (PZT) cantilever beams has been investigated for variable optical attenuator applications. The device is micromachined from a SOI substrate with a 5-mu m-thick Si device layer, with multilayers of Pt/Ti/PZT/Pt/Ti deposited as electrode materials. A large Si mirror plate and 1 x 10 arrayed PZT cantilevers arranged in parallel are formed after the release process. The ten cantilevers are designed to be electrically isolated from one another. A dual-core fiber collimator is aligned perpendicularly to the mirror in a 3-D light attenuation arrangement. Thus, three modes of attenuation mechanisms were investigated based on rotational and translational effects. A dynamic attenuation range of 40 dB is achieved at 1 V and 1.8 V for bending and torsional mode, respectively.
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