期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 18, 期 2, 页码 433-441出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2009.2013387
关键词
Calibration; force measurement; microelectromechanical devices; microsensors; torque measurement
类别
资金
- ETH Zurich
- KTI/CTI, Switzerland [6643.1, 6989.1]
- National Science Foundation, Switzerland [205321-102213]
This paper describes the design of a six-axis microelectromechanical systems (MEMS) force-torque sensor. A movable body is suspended by flexures that allow deflections and rotations along the x- y-, and z-axes. The orientation of this movable body is sensed by seven capacitors. Transverse sensing is used for all capacitors, resulting in a high sensitivity. A batch fabrication process is described as capable of fabricating these multiaxis sensors with a high yield. The force sensor is experimentally investigated, and a multiaxis calibration method is described. Measurements show that the resolution is on the order of a micro-Newton and nano-Newtonmeter. This is the first six-axis MEMS force sensor that has been successfully developed.
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