期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 18, 期 4, 页码 878-883出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2009.2021102
关键词
Fluid flow; fluidics; micropumps; piezoelectric devices
类别
资金
- Philip Leverhulme Prize (2005)
- Ebara Research Company, Ltd., Japan
The flow driven by a valveless micropump with a single cylindrical pump chamber and two diffuser/nozzle elements is studied theoretically using a 1-D model. The pump cavity is driven at an angular frequency omega so that its volume oscillates with an amplitude V(m). The presence of diffuser/nozzle elements with pressure-drop coefficients zeta(+), zeta(-)(> zeta(+)) and throat cross-sectional area A(1) creates a rectified mean flow. In the absence of frictional forces the maximum mean volume flux (with zero pressure head) is Q(0) where Q(0)/V(m)omega = (zeta(-)-zeta(+))pi/16(zeta(-)+zeta(+)), while the maximum pressure that can be overcome is Delta P(max) where Delta P(max)A(1)(2)/V(m)(2)omega(2) = (zeta(-) - zeta(+))/16 . These analytical results agree with numerical calculations for the coupled system of equations and compare well with the experimental results of Stemme and Stemme.
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