期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 17, 期 5, 页码 1195-1203出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2008.2003055
关键词
Bismuth alloys; fluid flow control; fluidics; modeling; valves
类别
资金
- National Science Foundation [EEC-0118025]
- National Institutes of Health
We present the design, fabrication, and characterization of a latchable microvalve. The valve can be held in the ON- or OFF-state without consuming power. A low-melting-temperature metal alloy provides structural support to hold the valve in place when latched. The metal alloy piece liquefies when it is heated above 62 degrees C, allowing a pneumatic actuator to change the valve state. When the metal cools and solidifies, the valve is once again latched. This type of valve may be useful for portable lab-on-a-chip devices that require low-power operation and long-term fluid storage. A thin-film metal heater has been integrated into the polydimethylsiloxane device to provide localized heating for individual valve elements. Valve closing and opening response times have been simulated and verified by experiment. The burst pressure has been experimentally characterized and parameters influencing this burst pressure have been modeled.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据