期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 17, 期 2, 页码 328-333出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2007.912714
关键词
atomic force microscopy (AFM); force measurements; in situ transmission electron microscope (TEM); MEMS; nanowire characterization
Here, we present a MEMS atomic force microscope sensor for use inside a transmission electron microscope ITEM). This enables direct in situ TEM force measurements in the nanonewton range and thus mechanical characterization of nanosized structures. The main design challenges of the system and sensor are to reach a high sensitivity and to make a compact design that allows the sensor to be fitted in the narrow dimensions of the pole gap inside the TEM. In order to miniaturize the sensing device, an integrated detection with piezoresistive elements arranged in a full Wheatstone bridge was used. Fabrication of the sensor was done using standard micromachining techniques, such as ion implantation, oxide growth and deep reactive ion etch. We also present in situ TEM force measurements on nanotubes, which demonstrate the ability to measure spring constants of nanoscale systems.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据