相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。Fabrication of Lithographically Defined Chemically Patterned Polymer Brushes and Mats
Chi-Chun Liu et al.
MACROMOLECULES (2011)
Towards an all-track 300 mm process for directed self-assembly
Chi-Chun Liu et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2011)
Effects of segregation strength and an external field on the thermal line edge and line width roughness spectra of a diblock copolymer resist
August W. Bosse
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2011)
Simple and Versatile Methods To Integrate Directed Self-Assembly with Optical Lithography Using a Polarity-Switched Photoresist
Joy Y. Cheng et al.
ACS NANO (2010)
Graphoepitaxial Assembly of Symmetric Block Copolymers on Weakly Preferential Substrates
Eungnak Han et al.
ADVANCED MATERIALS (2010)
Cross-sectional Imaging of Block Copolymer Thin Films on Chemically Patterned Surfaces
Guoliang Liu et al.
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY (2010)
Integration of Directed Self-Assembly with 193 nm Lithography
Daniel P. Sanders et al.
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY (2010)
Remediation of Line Edge Roughness in Chemical Nanopatterns by the Directed Assembly of Overlying Block Copolymer Films
Mark P. Stoykovich et al.
MACROMOLECULES (2010)
Interpolation in the Directed Assembly of Block Copolymers on Nanopatterned Substrates: Simulation and Experiments
Francois A. Detcheverry et al.
MACROMOLECULES (2010)
Integration of block copolymer directed assembly with 193 immersion lithography
Chi-Chun Liu et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B (2010)
Rapid directed assembly of block copolymer films at elevated temperatures
Adam M. Welander et al.
MACROMOLECULES (2008)
Density multiplication and improved lithography by directed block copolymer assembly
Ricardo Ruiz et al.
SCIENCE (2008)
Dimensions and shapes of block copolymer domains assembled on lithographically defined chemically patterned substrates
Erik W. Edwards et al.
MACROMOLECULES (2007)
Epitaxial self-assembly of block copolymers on lithographically defined nanopatterned substrates
SO Kim et al.
NATURE (2003)
Dynamics of pattern coarsening in a two-dimensional smectic system
C Harrison et al.
PHYSICAL REVIEW E (2002)
分享论文
