4.2 Article

RZLINE code modeling of distributed tin targets for laser-produced plasma sources of extreme ultraviolet radiation

相关参考文献

注意:仅列出部分参考文献,下载原文获取全部文献信息。
Article Physics, Applied

The effect of excitation wavelength on dynamics of laser-produced tin plasma

S. S. Harilal et al.

JOURNAL OF APPLIED PHYSICS (2011)

Review Physics, Applied

Physical processes in EUV sources for microlithography

V. Y. Banine et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2011)

Article Physics, Applied

The effect of laser wavelength on emission and particle dynamics of Sn plasma

D. Campos et al.

JOURNAL OF APPLIED PHYSICS (2010)

Article Physics, Applied

Enhancement of EUV emission intensity from particles in a droplet by exploding the droplet

Jingquan Lin et al.

JOURNAL OF PHYSICS D-APPLIED PHYSICS (2009)

Article Physics, Fluids & Plasmas

Plasma physics and radiation hydrodynamics in developing an extreme ultraviolet light source for lithography

Katsunobu Nishihara et al.

PHYSICS OF PLASMAS (2008)

Article Physics, Fluids & Plasmas

Calculation of tin emission spectra in discharge plasma: The influence of reabsorption in spectral lines

Vladimir G. Novikov et al.

HIGH ENERGY DENSITY PHYSICS (2007)

Article Physics, Applied

Optimizing 13.5 nm laser-produced tin plasma emission as a function of laser wavelength

J. White et al.

APPLIED PHYSICS LETTERS (2007)

Article Physics, Multidisciplinary

Ultimate efficiency of extreme ultraviolet radiation from a laser-produced plasma

T Aota et al.

PHYSICAL REVIEW LETTERS (2005)