相关参考文献
注意：仅列出部分参考文献，下载原文获取全部文献信息。
Article
Nanoscience & Nanotechnology
Influence of substrate bias on the structure and properties of ZrN films deposited by cathodic vacuum arc
E. W. Niu et al.
MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING (2007)
Article
Materials Science, Coatings & Films
Radio frequency dual magnetron sputtering deposition and characterization of nanocomposite Al2O3-ZrO2 thin films
DH Trinh et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2006)
分享论文
