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Selective-area growth of III-V nanowires and their applications

期刊

JOURNAL OF MATERIALS RESEARCH
卷 26, 期 17, 页码 2127-2141

出版社

CAMBRIDGE UNIV PRESS
DOI: 10.1557/jmr.2011.103

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资金

  1. Ministry of Education, Culture, Sports, Science and Technology (MEXT)
  2. Japan Science and Technology Agency (JST) PRESTO
  3. Grants-in-Aid for Scientific Research [23360129, 23221007] Funding Source: KAKEN

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We review the position-controlled growth of III-V nanowires (NWs) by selective-area metal-organic vapor-phase epitaxy (SA-MOVPE). This epitaxial technique enables the positioning of the vertical NWs on (111) oriented surfaces with lithographic techniques. Core-shell structures have also been achieved by controlling the growth mode during SA-MOVPE. The core-shell III-V NW-based devices such as light-emitting diodes, photovoltaic cells, and vertical surrounding-gate transistors are discussed in this article. Nanometer-scale growth also enabled the integration of III-V NWs on Si regardless of lattice mismatches. These demonstrated achievements should have broad applications in laser diodes, photodiodes, and high-electron mobility transistors with functionality on Si not made possible with conventional Si-CMOS techniques.

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