期刊
JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
卷 213, 期 6, 页码 895-904出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.jmatprotec.2012.12.010
关键词
Micro-machining; V-shaped groove; Burr; Roller nano-imprint
资金
- National Basic Research Program of China (973 Program) [2011CB706703]
- National Science and Technology Major Project [2011ZX04014-071]
- National Natural Science Foundation of China [90923038, 51275559, 50935001]
- National High Technology Research and Development Program of China (863 Program) [2012AA040405]
The roller nano-imprint technology is considered as efficient and low cost method for the large scale micro-pitch grating fabrication. The surface quality of the V-shaped grooves for roller grating template developed by diamond tool cutting process is investigated. The surface quality of the micro V-shaped grating is optimized with minimized burr formation by optimizing the cutting tool's shape design and the micro-cutting process, based on the chip morphology and non-free chip interference analyses. Burr shows different variation with the grating pitch of 10-20 mu m and less than 2 mu m. The burr formation mechanism for V-shaped micro-cutting is studied by material (H62 Copper) metallography and homogeneity analyses. Finally, high precision grating template with various pitches is successfully achieved. (c) 2013 Elsevier B.V. All rights reserved.
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