A facile route to patterned epitaxial ZnO nanostructures by soft lithography

Combining two robust, facile, and low cost techniques-nanoimprint lithography and low temperature aqueous solution phase epitaxy of ZnO-enabled the fabrication of nanostructured single crystal surfaces. Various patterns were fabricated with sub-micron resolution, including an array of 70 nm diameter posts. The method requires no vacuum equipment and has a maximum process temperature of 110 degrees C.