期刊
JOURNAL OF MATERIALS CHEMISTRY
卷 20, 期 18, 页码 3703-3708出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/b926044g
关键词
-
资金
- Dutch Science Foundation SenterNovem and Materials innovation [MC3.06278]
The deposition feasibility and electrochemical evaluation of highly structured negative electrode stacks for 3D-integrated batteries is demonstrated. The stacks comprise a TiN thin film, serving as both current collector and Li-barrier layer, covered by a polycrystalline Si (poly-Si) thin film as electrode material. In comparison with planar films, these poly-Si films present a storage capacity increase of about 5 x for the highest pore aspect ratio electrodes. The step coverage of poly-Si can be considerably improved by growing TiN and poly-Si into wide trenches. This results in much smoother poly-Si films and significantly improved step coverage. Further optimization of the trench dimensions should result in poly-Si films with a Li-storage capacity increase of more than one order of magnitude with respect to planar films.
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