Magnetic properties of anisotropic Pr-Fe-B films with different deposition rates and pressures

Anisotropic Pr-Fe-B films with hard magnetic properties have been prepared by DC magnetron sputtering on heated Si (100) substrates. The influences of thickness, deposition rate and sputtering gas pressure on the magnetic properties of Pr-Fe-B films were investigated. It is found that the magnetic properties are sensitive to deposition rate and sputtering gas pressure. High deposition rate and argon pressure result in a high coercivity and a low remanence. (C) 2012 Elsevier B.V. All rights reserved.