期刊
JOURNAL OF LOW TEMPERATURE PHYSICS
卷 169, 期 5-6, 页码 386-399出版社
SPRINGER/PLENUM PUBLISHERS
DOI: 10.1007/s10909-012-0654-z
关键词
Silicon micromachines; MEMS; Optical switching; Vortices; NSOM
Over the last decade or so a group of us, while working at Bell Labs, have been able to develop a large number of silicon micromachines for a wide range of applications. In this article, which is part of a special volume to celebrate the career of Professor Francis Gasparini who is an old friend and colleague, we review the devices we have been able to build and discuss their applications. These applications range from scientific experiments looking at single vortex dynamics and the observation of the Casimir effect to technological applications such as a large, all-optical switch. In this article we make the point that MEMS devices and VLSI processing are the New Physics Machine Shop.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据