期刊
JOURNAL OF LIGHTWAVE TECHNOLOGY
卷 32, 期 17, 页码 3036-3042出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JLT.2014.2337013
关键词
Laser direct writing; optical interconnects; siloxane; single-mode polymer waveguides
Using a custom-built laser direct writing system, single-mode polymer optical waveguides, and devices for board-level optical interconnects were fabricated. A novel photopatternable polysiloxane material was developed that combines low-loss, simple, and large-area processability, and reliability during manufacturing and system operation. The polysiloxane waveguides were designed with quadratic cross sections of 5.5 x 5.5 mu m(2) and a refractive index contrast of 0.0086 between core and cladding polymer for single-mode operation at the wavelength of 1.3 mu m. A straight waveguide propagation loss of 0.28 dB/cm was achieved. A wide range of passive optical devices, including Y-splitters, directional couplers, and Mach-Zehnder interferometers were successfully fabricated and characterized. The results prove that the presented combination of material and process technology is a viable implementation for short distance board-level optical links.
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