期刊
JOURNAL OF LIGHTWAVE TECHNOLOGY
卷 32, 期 8, 页码 1463-1471出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JLT.2013.2296295
关键词
Antireflection structure; coupled-wave analysis; subwavelength grating; terahertz wave; thin film theory
资金
- National Basic Research Program of China [2014CB339800, 2010CB327604, 2011CB808101]
- National Natural Science Foundation of China [61077083, 61027013, 61078028, 60838004]
- NSFC-RFBR program [61211120193]
Materials in the terahertz (THz) region have high refractive indices, thus leading to significant Fresnel reflection loss. We present a step-by-step 2-D THz antireflection grating design procedure using thin film theory and coupled-coefficient-matrix method. A thin film with desirable properties is first optimized by genetic algorithm, and a 'translation' from thin film to multilevel grating is then implemented with the coupled-coefficient-matrix method. A final smoothing step leads to a square-pyramidal-frustum grating. Using rigorous coupled-wave analysis, we demonstrate a subwavelength square-pyramidal-frustum grating based on silicon producing broadband (0.5 to 5 THz) and efficient (transmittance> 95%) polarization-independent antireflection effects. The grating parameters are evaluated, showing that our design is resistant to parameter deviations such as grating depth and incidence angle.
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