期刊
JOURNAL OF LASER MICRO NANOENGINEERING
卷 6, 期 1, 页码 37-43出版社
JAPAN LASER PROCESSING SOC
DOI: 10.2961/jlmn.2011.01.0009
关键词
diffractive optics; beam shaper; laser processing; flat-top
资金
- Federal Government of Hessen (Germany) [165/08-27]
- Hessen Agentur
- Research Council of Lithuania [AUT-06/2010]
Laser beam shaping and homogenization techniques are substantial to optimize a large number of laser-material processing applications and laser-material interaction studies. Diffractive optical elements (DOE) play important role in provision of the process-adapted laser beam shaping. In this paper, we present an approach for laser beam shaping by using innovative DOE. The circular Gaussian beam was transformed to a square flat-top intensity profile in the focal plane of the objective lens by using novel DOE from TOPAG Lasertechnik GmbH. About 95% of the laser energy was coupled in the main beam with a nearly perfect rectangular shape. Experimental results have been achieved by applying the shaped beam for laser microfabrication. The picosecond and nanosecond lasers with moderate beam quality (M-2 = 1.5) were used in the experiment. The shaped laser beam was applied for direct laser ablation of metal film on the glass substrate, drilling in a silicon wafer, scribing of thin-film solar cells and other technical materials. This technique allows creating a rectangular- shaped flat-top intensity profile in the focal plane that shows distinct advantages in laser material processing.
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