MEMS Based Structurally Tunable Metamaterials at Terahertz Frequencies

We present the design, simulation, fabrication and characterization of structurally tunable metamaterials showing a marked tunability of the electric and magnetic responses at terahertz frequencies. Our results demonstrate that structurally tunable metamaterials offer significant potential to realize novel electromagnetic functionality ranging from dynamical filtering to reconfigurable cloaks or detectors. Furthermore, this approach is not limited to terahertz frequencies and may be readily used over much of the electromagnetic spectrum.