期刊
JOURNAL OF HEAT TRANSFER-TRANSACTIONS OF THE ASME
卷 130, 期 12, 页码 -出版社
ASME-AMER SOC MECHANICAL ENG
DOI: 10.1115/1.2976552
关键词
Raman spectroscopy; thermometry; MEMS; thermal actuators
Micro-Raman thermometry has been demonstrated to be a feasible technique for obtaining surface temperatures with micron-scale spatial resolution for microelectronic and microelectromechanical systems (MEMSs). However, the intensity of the Raman signal emerging from the probed device is very low and imposes a requirement of prolonged data collection times in order to obtain reliable temperature information. This characteristic currently limits Raman thermometry to steady-state conditions and thereby prevents temperature measurements of transient and fast tune-scale events. In this paper, we discuss the extension of the micro-Raman thermometry diagnostic technique to obtain transient temperature measurements on microelectromechanical devices with 100 As temporal resolution. Through the use of a phase-locked technique we are able to obtain temperature measurements on. electrically powered MEMS actuators powered with a periodic signal. Furthermore, we demonstrate a way of obtaining reliable temperature measurements on micron-scale devices that undergo mechanical movement during the device operation. [DOI: 10.1115/1.2976552]
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