期刊
OPTICS EXPRESS
卷 23, 期 16, 页码 21287-21295出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.23.021287
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资金
- Cabinet Office, Government of Japan
- Japan Society for the Promotion of Science (JSPS) through the Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program)
- Nanotechnology Support Project
We experimentally demonstrate low-loss and polarization-insensitive fiber-to-chip coupling spot-size converters (SSCs) comprised of a three dimensionally tapered Si wire waveguide, a SiON secondary waveguide, and a SiO2 spacer inserted between them. Fabricated SSCs with the SiO2 spacer exhibit fiber-to-chip coupling loss of 1.5 dB/facet for both the quasi-TE and TM modes and a small wavelength dependence in the C- and L-band regions. The SiON secondary waveguide is present only around the SSC region, which significantly suppresses the influence of the well-known N-H absorption of plasma-deposited SiON at around 1510 nm. (C) 2015 Optical Society of America
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