期刊
OPTICS EXPRESS
卷 23, 期 21, 页码 27819-27828出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.23.027819
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资金
- State Key Development Program of Basic Research of China (973 Project) [2011CB706700]
- National Natural Science Foundation of China [51375337]
- Tianjin Research Program of Application Foundation and Advanced Technology [14JCQNJC05200]
- '111' project by the State Administration of Foreign Experts Affairs of China [B07014]
Micro v-groove has found wide applications in optical areas as one of the most important structures. However, its performance is significantly affected by its angular geometry accuracy. The diamond cutting has been commonly used as the fabrication method of micro v-groove, but it is still difficult to guarantee the cutting tool angle, which is limited by the measurement accuracy in the manufacture and mounting of the diamond tool. A cutting tool alignment method based on the on-machine measurement is proposed to improve the fabricated quality of the v-groove angle. An on-machine probe is employed to scan the v-groove geometrical deviation precisely. The system errors model, data processing algorithm and tool alignment methods are analyzed in details. Experimental results show that the measurement standard deviation within 0.01 degrees can be achieved. Retro-reflection mirrors are fabricated and measured finally by the proposed method for verification. (C) 2015 Optical Society of America
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